7/8/2011	9:19:17 AM	Main Vac valve closed
7/8/2011	9:19:29 AM	Main Vac valve opened
7/8/2011	9:34:53 AM	Main Vac valve closed
7/8/2011	9:35:03 AM	Main Vac valve opened
7/8/2011	9:35:47 AM	Main Vac valve closed
7/8/2011	9:35:57 AM	SiCl4 post valve opened
7/8/2011	9:36:57 AM	Helium MFC set to  500.000000
7/8/2011	9:36:58 AM	Helium valve opened
7/8/2011	9:37:12 AM	Bypass valve opened
7/8/2011	9:39:35 AM	Bypass valve closed
7/8/2011	9:39:35 AM	Main Vac valve opened
7/8/2011	9:43:16 AM	Main Vac valve closed
7/8/2011	9:43:24 AM	Main Vac valve opened
7/8/2011	10:05:51 AM	Main Vac valve closed
7/8/2011	10:06:05 AM	Main Vac valve opened
7/8/2011	10:07:13 AM	Main Vac valve closed
7/8/2011	10:07:19 AM	SiCl4 MFC set to  100.000000
7/8/2011	10:07:21 AM	SiCl4 pre valve opened
7/8/2011	10:07:26 AM	Bypass valve opened
7/8/2011	10:07:47 AM	Bypass valve closed
7/8/2011	10:07:47 AM	Main Vac valve opened
7/8/2011	10:13:50 AM	Main Vac valve closed
7/8/2011	10:13:56 AM	Main Vac valve opened
7/8/2011	10:14:28 AM	Helium valve closed
7/8/2011	10:14:30 AM	SiCl4 pre valve closed
7/8/2011	10:14:34 AM	SiCl4 post valve closed
7/8/2011	10:15:54 AM	Main Vac valve closed
7/8/2011	10:16:03 AM	Helium valve opened
7/8/2011	10:16:03 AM	SiCl4 pre valve opened
7/8/2011	10:16:04 AM	SiCl4 post valve opened
7/8/2011	10:17:11 AM	Helium valve closed
7/8/2011	10:17:12 AM	SiCl4 pre valve closed
7/8/2011	10:17:13 AM	SiCl4 post valve closed
7/8/2011	10:28:02 AM	Bypass valve opened
7/8/2011	10:29:19 AM	Bypass valve closed
7/8/2011	10:29:20 AM	Main Vac valve opened
7/8/2011	10:49:56 AM	Main Vac valve closed
7/8/2011	10:50:05 AM	Main Vac valve opened
7/8/2011	10:58:26 AM	Main Vac valve closed
7/8/2011	10:59:04 AM	Main Vac valve opened
7/8/2011	10:59:32 AM	Main Vac valve closed
7/8/2011	11:05:07 AM	Bypass valve opened
7/8/2011	11:05:12 AM	SiCl4 post valve opened
7/8/2011	11:05:20 AM	SiCl4 pre valve opened
7/8/2011	11:05:23 AM	Helium valve opened
7/8/2011	11:09:03 AM	Bypass valve closed
7/8/2011	11:09:03 AM	Main Vac valve opened
7/8/2011	11:33:21 AM	SiCl4 MFC set to  0.000000
7/8/2011	11:33:23 AM	SiCl4 pre valve closed
7/8/2011	11:33:56 AM	Helium MFC set to  0.000000
7/8/2011	11:33:56 AM	Helium valve closed
7/8/2011	11:34:43 AM	SiCl4 post valve closed
7/8/2011	11:35:50 AM	Main Vac valve closed
7/8/2011	11:35:59 AM	H2 MFC set to  100.000000
7/8/2011	11:36:00 AM	H2 valve opened
7/8/2011	11:36:23 AM	Bypass valve opened
7/8/2011	11:36:54 AM	H2 MFC set to  500.000000
7/8/2011	11:37:25 AM	Bypass valve closed
7/8/2011	11:37:26 AM	Main Vac valve opened
7/8/2011	11:45:12 AM	Main Vac valve closed
7/8/2011	11:45:20 AM	Main Vac valve opened
7/8/2011	11:53:05 AM	Main Vac valve closed
7/8/2011	11:53:12 AM	Main Vac valve opened
7/8/2011	11:53:29 AM	H2 valve closed
7/8/2011	11:53:42 AM	H2 valve opened
7/8/2011	11:56:50 AM	Main Vac valve closed
7/8/2011	11:56:52 AM	H2 valve closed
7/8/2011	11:57:13 AM	H2 valve opened
7/8/2011	11:57:22 AM	Main Vac valve opened
7/8/2011	12:14:51 PM	Main Vac valve closed
7/8/2011	12:14:58 PM	Main Vac valve opened
7/8/2011	12:15:52 PM	H2 valve closed
7/8/2011	12:16:30 PM	Main Vac valve closed
7/8/2011	12:16:33 PM	H2 valve opened
7/8/2011	12:16:44 PM	Bypass valve opened
7/8/2011	12:20:28 PM	Bypass valve closed
7/8/2011	12:20:29 PM	Main Vac valve opened
7/8/2011	1:36:44 PM	H2 valve closed
7/8/2011	1:37:07 PM	Main Vac valve closed
7/8/2011	1:37:09 PM	H2 valve opened
7/8/2011	1:37:21 PM	Bypass valve opened
7/8/2011	1:41:15 PM	Bypass valve closed
7/8/2011	1:41:16 PM	Main Vac valve opened
7/8/2011	1:49:55 PM	H2 valve closed
7/8/2011	1:50:15 PM	Main Vac valve closed
7/8/2011	1:50:16 PM	H2 valve opened
7/8/2011	1:50:23 PM	Bypass valve opened
7/8/2011	1:54:16 PM	Bypass valve closed
7/8/2011	1:54:17 PM	Main Vac valve opened
7/8/2011	2:08:43 PM	H2 valve closed
7/8/2011	2:09:01 PM	Main Vac valve closed
7/8/2011	2:09:02 PM	H2 valve opened
7/8/2011	2:09:18 PM	Bypass valve opened
7/8/2011	2:13:06 PM	Bypass valve closed
7/8/2011	2:13:07 PM	Main Vac valve opened
7/8/2011	2:30:12 PM	H2 valve closed
7/8/2011	2:30:25 PM	Main Vac valve closed
7/8/2011	2:30:27 PM	Bypass valve opened
7/8/2011	2:30:27 PM	Bypass valve closed
7/8/2011	2:30:33 PM	H2 valve opened
7/8/2011	2:30:40 PM	Bypass valve opened
7/8/2011	2:34:28 PM	Bypass valve closed
7/8/2011	2:34:29 PM	Main Vac valve opened
7/8/2011	2:46:28 PM	H2 valve closed
7/8/2011	2:47:15 PM	Main Vac valve closed
7/8/2011	2:47:16 PM	SiCl4 post valve opened
7/8/2011	2:47:20 PM	SiCl4 pre valve opened
7/8/2011	2:47:21 PM	Helium valve opened
7/8/2011	2:47:26 PM	Helium MFC set to  500.000000
7/8/2011	2:47:31 PM	SiCl4 MFC set to  100.000000
7/8/2011	2:47:45 PM	Bypass valve opened
7/8/2011	2:49:42 PM	Bypass valve closed
7/8/2011	2:49:43 PM	Main Vac valve opened
7/8/2011	3:24:42 PM	Helium valve closed
7/8/2011	3:24:42 PM	SiCl4 pre valve closed
7/8/2011	3:24:44 PM	SiCl4 post valve closed
7/8/2011	3:26:25 PM	Main Vac valve closed
7/8/2011	3:26:47 PM	Helium valve opened
7/8/2011	3:26:49 PM	SiCl4 post valve opened
7/8/2011	3:26:51 PM	SiCl4 pre valve opened
7/8/2011	3:26:55 PM	Bypass valve opened
7/8/2011	3:29:14 PM	Bypass valve closed
7/8/2011	3:29:15 PM	Main Vac valve opened
7/8/2011	3:40:45 PM	SiCl4 pre valve closed
7/8/2011	3:40:46 PM	Helium valve closed
7/8/2011	3:40:47 PM	SiCl4 post valve closed
7/8/2011	3:41:48 PM	Main Vac valve closed
7/8/2011	3:41:51 PM	SiCl4 pre valve opened
7/8/2011	3:41:52 PM	SiCl4 post valve opened
7/8/2011	3:41:53 PM	Helium valve opened
7/8/2011	3:42:09 PM	Bypass valve opened
7/8/2011	3:46:27 PM	Bypass valve closed
7/8/2011	3:46:29 PM	Main Vac valve opened
7/8/2011	3:58:22 PM	Helium valve closed
7/8/2011	3:58:23 PM	SiCl4 pre valve closed
7/8/2011	3:58:24 PM	SiCl4 post valve closed
7/8/2011	3:58:39 PM	Main Vac valve closed
7/8/2011	3:58:46 PM	Helium valve opened
7/8/2011	3:58:46 PM	SiCl4 pre valve opened
7/8/2011	3:58:47 PM	SiCl4 post valve opened
7/8/2011	3:58:54 PM	Bypass valve opened
7/8/2011	3:58:54 PM	Bypass valve closed
7/8/2011	3:58:55 PM	Bypass valve opened
7/8/2011	4:03:38 PM	Bypass valve closed
7/8/2011	4:03:39 PM	Main Vac valve opened
7/8/2011	4:13:51 PM	Helium valve closed
7/8/2011	4:13:51 PM	SiCl4 pre valve closed
7/8/2011	4:13:52 PM	SiCl4 post valve closed
7/8/2011	4:14:06 PM	Main Vac valve closed
7/8/2011	4:14:07 PM	Helium valve opened
7/8/2011	4:14:08 PM	SiCl4 pre valve opened
7/8/2011	4:14:09 PM	SiCl4 post valve opened
7/8/2011	4:14:14 PM	Bypass valve opened
7/8/2011	4:18:41 PM	Bypass valve closed
7/8/2011	4:18:41 PM	Main Vac valve opened
7/8/2011	4:29:37 PM	Helium valve closed
7/8/2011	4:29:37 PM	SiCl4 pre valve closed
7/8/2011	4:29:38 PM	SiCl4 post valve closed
7/8/2011	4:29:52 PM	Main Vac valve closed
7/8/2011	4:29:54 PM	Helium valve opened
7/8/2011	4:29:55 PM	SiCl4 pre valve opened
7/8/2011	4:29:56 PM	SiCl4 post valve opened
7/8/2011	4:30:12 PM	Bypass valve opened
7/8/2011	4:36:03 PM	Bypass valve closed
7/8/2011	4:36:04 PM	Main Vac valve opened
7/8/2011	4:48:21 PM	Helium valve closed
7/8/2011	4:48:22 PM	SiCl4 pre valve closed
7/8/2011	4:48:23 PM	SiCl4 post valve closed
7/8/2011	4:49:03 PM	Main Vac valve closed
7/8/2011	4:49:06 PM	Helium valve opened
7/8/2011	4:49:06 PM	SiCl4 pre valve opened
7/8/2011	4:49:07 PM	SiCl4 post valve opened
7/8/2011	4:49:17 PM	Bypass valve opened
7/8/2011	4:54:03 PM	Bypass valve closed
7/8/2011	4:54:04 PM	Main Vac valve opened
7/8/2011	4:59:11 PM	Helium valve closed
7/8/2011	4:59:12 PM	SiCl4 pre valve closed
7/8/2011	4:59:12 PM	SiCl4 post valve closed
7/8/2011	4:59:17 PM	Helium MFC set to  0.000000
7/8/2011	4:59:20 PM	H2 MFC set to  0.000000
7/8/2011	4:59:23 PM	SiCl4 MFC set to  0.000000
7/8/2011	5:00:00 PM	SiCl4 post valve opened
